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Recovery of plasma-induced damage in PZT thin film with O-2 gas annealing

Kang, MG; Kim, KT; Kim, CI

ArticleIssue Date2001CitationTHIN SOLID FILMS, v.398-399, pp 448 - 453PublisherELSEVIER SCIENCE SA
Study on the etching damage characteristics of PZT thin films after etching in Cl-based plasma

Kim, KT; Kang, MG; Kim, CI

ArticleIssue Date2004CitationMICROELECTRONIC ENGINEERING, v.71, no.3-4, pp 294 - 300PublisherELSEVIER SCIENCE BV
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