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Plasma-induced damage in PZT thin films etched by inductively coupled plasma

Kang, MG; Kim, KT; Kim, CI

ArticleIssue Date2003CitationTHIN SOLID FILMS, v.435, no.1-2, pp 222 - 226PublisherELSEVIER SCIENCE SA

Large remanent polarization of cerium-modified bismuth-titanate thin films for ferroelectric random access memories

Kim, K.T.; Kim, C.I.; Kang, D.H.; Shim, I.W.

ArticleIssue Date2003CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.21, no.4, pp 1376 - 1380PublisherA V S AMER INST PHYSICS

On mechanisms of argon addition influence on etching rate in chlorine plasma

Efremov, AM; Kim, DP; Kim, CI

ArticleIssue Date2003CitationTHIN SOLID FILMS, v.435, no.1-2, pp 232 - 237PublisherELSEVIER SCIENCE SA

The etching characteristics of SrBi2Ta2O9 thin film in CF4/Ar plasma using magnetically enhanced inductively coupled plasma

Kim, DP; Kim, CI

ArticleIssue Date2001CitationTHIN SOLID FILMS, v.385, no.1-2, pp 162 - 166PublisherELSEVIER SCIENCE SA

CH4 플라즈마에 따른 TiN 박막 표면의 식각특성 연구

우종창; 엄두승; 김관하; 김동표; 김창일

ArticleIssue Date2008Citation한국표면공학회지, v.41, no.5, pp 189 - 193Publisher한국표면공학회

BCl₃/Ar 플라즈마에 Cl₂ 가스 첨가에 따른 TiN 박막의 식각 특성

엄두승; 우종창; 김동표; 김창일

ArticleIssue Date2008Citation전기전자재료학회논문지, v.21, no.12, pp 1051 - 1056Publisher한국전기전자재료학회

Sm이 첨가된 PZT 박막의 강유전 특성

손영훈; 장의구; 김창일; 김경태; 이병기

ArticleIssue Date2004Citation전기전자재료학회논문지, v.17, no.2, pp 178 - 183Publisher한국전기전자재료학회

Damage on the surface of zinc oxide thin films etched in CL-based gas chemistry

Woo, J.-C.; Ha, T.-K.; Li, C.; Kim, S.-H.; Park, J.-S.; Heo, K.-M.; Kim, C.-I.

ArticleIssue Date2011CitationTransactions on Electrical and Electronic Materials, v.12, no.2, pp 51 - 55Publisher한국전기전자재료학회

Dry etching characteristics of zinc oxide thin films in Cl2-based plasma

Woo, J.-C.; Ha, T.-K.; Li, C.; Kim, S.-H.; Park, J.-S.; Heo, K.-M.; Kim, C.-I.

ArticleIssue Date2011CitationTransactions on Electrical and Electronic Materials, v.12, no.2, pp 60 - 63Publisher한국전기전자재료학회

Catalytic Growth and Properties of Carbon Nanotubes from Fe-Mo/MgO by Chemical Vapor Deposition

우종창; Kyoung-Tae Kim; Gwan-Ha Kim; Jong-Sik Kim; Jong-Gyu Kim; 김창일

ArticleIssue Date2007CitationTransactions on Electrical and Electronic Materials, v.8, no.5, pp 206 - 210Publisher한국전기전자재료학회

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