RF 마그네트론 스퍼터링을 이용한 ITO 기판에불순물 증착에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박정철 | - |
dc.contributor.author | 추순남 | - |
dc.date.available | 2020-02-28T11:43:27Z | - |
dc.date.created | 2020-02-12 | - |
dc.date.issued | 2015 | - |
dc.identifier.issn | 1229-800x | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/11219 | - |
dc.description.abstract | In this paper, we have studied the surface property and transmittance of n- and p-type thin film deposited on ITO substrate. In n-type samples, the average particle size was large and uniform as RF power was increased, and the best results were shown at the condition of the temperature of 300℃ and 200 W of RF power. The transmittance of the sample deposited for 20 minutes was 74.82% and the light wave was increased to 800 nm. In p-type samples, the results were 71.21% and 789 nm at the deposition condition of the RF power of 250 W and the temperature of 250℃. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 대한전기학회 | - |
dc.relation.isPartOf | 전기학회 논문지 P권 | - |
dc.title | RF 마그네트론 스퍼터링을 이용한 ITO 기판에불순물 증착에 관한 연구 | - |
dc.title.alternative | Study of Impurity Deposition on ITO Substrate using RF Magnetron Sputtering | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 전기학회 논문지 P권, v.64, no.4, pp.277 - 280 | - |
dc.identifier.kciid | ART002052370 | - |
dc.citation.endPage | 280 | - |
dc.citation.startPage | 277 | - |
dc.citation.title | 전기학회 논문지 P권 | - |
dc.citation.volume | 64 | - |
dc.citation.number | 4 | - |
dc.contributor.affiliatedAuthor | 박정철 | - |
dc.contributor.affiliatedAuthor | 추순남 | - |
dc.subject.keywordAuthor | ITO substrate | - |
dc.subject.keywordAuthor | RF power | - |
dc.subject.keywordAuthor | Transmittance | - |
dc.subject.keywordAuthor | Temperature | - |
dc.description.journalRegisteredClass | kci | - |
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