A study of ZnO/PEDOT:PSS based UV sensors with RF sputter

Abstract

ZnO is an abundant material with a broad band gap energy (3.37 eV), large exciton binding energy (60 mV at room temperature), excellent optical and electrical properties, excellent chemical and thermal stability, and high radiation intensity. ZnO has attracted significant attention due to its excellent optical and electrical properties among conductive thin film materials. Previous studies have shown that films deposited using radio-frequency (RF) magnetron sputtering exhibit good crystallinity and microstructural uniformity even at low substrate temperatures. In this study, a simple ultraviolet (UV) sensor based on ZnO/polymer is demonstrated. ZnO was deposited on a soda lime substrate by spray coating, spin coating and RF sputtering. Subsequently, PEDOT: PSS was coated to compare the sensitivity and reactivity under UV irradiation. Samples prepared via RF sputtering showed excellent properties under UV irradiation. (c) 2019 The Japan Society of Applied Physics