Metal-insulator-silicon semiconductor photodetectors using ZnO nanocones as an efficient anti-reflective coating

Abstract

Novel ZnO nanocone anti-reflective coating (ARC) was realized on ITO-Si metal-insulator-semiconductor (MIS) photodetector. The ZnO nanocone-coated device demonstrated significant suppression of reflectance compared with that of a conventional planar device. The ZnO nanocone MIS photodetector showed a 15% enhanced external quantum efficiency (EQE) compared to a planar MIS photodetector, and indicated a flat response over a broad range of wavelength from the visible to IR spectra. In addition, the EQE of the nanocone device exhibited a stable response with respect to the angle of incidence, which indicates improved device characteristics of the ZnO nanocone ARC. (C) 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim