Effect of post-annealing on structural and electrochemical properties of lithium phosphorus oxynitride thin film
DC Field | Value | Language |
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dc.contributor.author | Ko, Jaehwan | - |
dc.contributor.author | Yoon, Young Soo | - |
dc.date.available | 2020-04-06T06:44:24Z | - |
dc.date.created | 2020-04-02 | - |
dc.date.issued | 2020-06 | - |
dc.identifier.issn | 0272-8842 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/26358 | - |
dc.description.abstract | In this study, the structural and electrochemical properties of post-annealed lithium phosphorus oxynitride (LiPON) thin films were confirmed. LiPON thin films were deposited using a radio-frequency sputtering method, and post-annealing was performed in the temperature range of 100–400 °C. Compared with the initial as-depo state, the impedance decreased at temperatures of 100 and 200 °C, and it again increased at 300 and 400 °C. As a result, the lowest impedance was seen at 200 °C, and it increased significantly at 400 °C. To verify the cause of the electrochemical changes, the structural properties of the post-annealed LiPON thin films were confirmed using analytical methods, including X-ray diffraction (XRD), scanning electron microscope (SEM), and X-ray photoelectron spectroscopy (XPS). XRD and SEM analysis showed that the LiPON thin film prepared in this study had a typical amorphous structure and no change in crystal structure and morphology occurred at 400 °C. XPS analysis showed that the Li1s/P2p ratio had the greatest effect on the impedance change, according to the post-annealing temperature of LiPON thin films. The ionic conductivity evaluation of the five samples showed that 200 °C post-annealing was effective in increasing the ionic conductivity of LiPON thin films, and the effect was reproducible. © 2020 Elsevier Ltd and Techna Group S.r.l. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER SCI LTD | - |
dc.relation.isPartOf | Ceramics International | - |
dc.title | Effect of post-annealing on structural and electrochemical properties of lithium phosphorus oxynitride thin film | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000551128800137 | - |
dc.identifier.doi | 10.1016/j.ceramint.2020.02.207 | - |
dc.identifier.bibliographicCitation | Ceramics International, v.46, no.9, pp.14071 - 14077 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.scopusid | 2-s2.0-85080041560 | - |
dc.citation.endPage | 14077 | - |
dc.citation.startPage | 14071 | - |
dc.citation.title | Ceramics International | - |
dc.citation.volume | 46 | - |
dc.citation.number | 9 | - |
dc.contributor.affiliatedAuthor | Ko, Jaehwan | - |
dc.contributor.affiliatedAuthor | Yoon, Young Soo | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Electrochemical properties | - |
dc.subject.keywordAuthor | LiPON thin film | - |
dc.subject.keywordAuthor | Post-annealing | - |
dc.subject.keywordAuthor | Structural properties | - |
dc.subject.keywordAuthor | Thin film electrolyte | - |
dc.subject.keywordPlus | Annealing | - |
dc.subject.keywordPlus | Crystal structure | - |
dc.subject.keywordPlus | Electrochemical properties | - |
dc.subject.keywordPlus | Electrolytes | - |
dc.subject.keywordPlus | Ionic conductivity | - |
dc.subject.keywordPlus | Lithium compounds | - |
dc.subject.keywordPlus | Morphology | - |
dc.subject.keywordPlus | Nitrides | - |
dc.subject.keywordPlus | Scanning electron microscopy | - |
dc.subject.keywordPlus | Sputtering | - |
dc.subject.keywordPlus | Structural properties | - |
dc.subject.keywordPlus | X ray diffraction | - |
dc.subject.keywordPlus | X ray photoelectron spectroscopy | - |
dc.subject.keywordPlus | Amorphous structures | - |
dc.subject.keywordPlus | Analytical method | - |
dc.subject.keywordPlus | Crystal structure and morphology | - |
dc.subject.keywordPlus | Lithium phosphorus oxynitride | - |
dc.subject.keywordPlus | Post annealing | - |
dc.subject.keywordPlus | Post-annealing temperature | - |
dc.subject.keywordPlus | Radio frequency sputtering method | - |
dc.subject.keywordPlus | Thin film electrolytes | - |
dc.subject.keywordPlus | Thin films | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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