Effects of rapid thermal annealing on the electrical and structural properties of Mo/SiC schottky contacts
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Hong, Jeongsoo | - |
dc.contributor.author | Kim, Ki Hyn | - |
dc.contributor.author | Kim, Kyung Hwan | - |
dc.date.available | 2020-02-27T08:41:06Z | - |
dc.date.created | 2020-02-06 | - |
dc.date.issued | 2018-12-12 | - |
dc.identifier.issn | 1542-1406 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/2977 | - |
dc.description.abstract | In this work, the effects of rapid thermal annealing on the electrical and structural properties of Mo/SiC Schottky contacts which fabricated by FTS system were investigated. As-fabricated Mo/SiC Schottky contacts were thermally treated in Ar atmosphere at the temperature of 500-700 degrees C, for 120s. By the rapid thermal annealing process, the SBHs of diodes were decreased while other parameters including series resistance and ideality factor were not changed significantly. However significant degradation in reverse blocking performance was occurred with the annealing temperature of 700 degrees C. This was in tendency of proportional to the thickness of interfacial layers between Mo and SiC. Optimal annealing condition for Mo/SiC Schottky contacts was found to be at 600 degrees C for 120 sec. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | TAYLOR & FRANCIS LTD | - |
dc.relation.isPartOf | MOLECULAR CRYSTALS AND LIQUID CRYSTALS | - |
dc.subject | DIODES | - |
dc.subject | PARAMETERS | - |
dc.subject | CONSTANT | - |
dc.subject | PLOT | - |
dc.title | Effects of rapid thermal annealing on the electrical and structural properties of Mo/SiC schottky contacts | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000476527000001 | - |
dc.identifier.doi | 10.1080/15421406.2019.1596240 | - |
dc.identifier.bibliographicCitation | MOLECULAR CRYSTALS AND LIQUID CRYSTALS, v.677, no.1, pp.1 - 9 | - |
dc.identifier.scopusid | 2-s2.0-85069797726 | - |
dc.citation.endPage | 9 | - |
dc.citation.startPage | 1 | - |
dc.citation.title | MOLECULAR CRYSTALS AND LIQUID CRYSTALS | - |
dc.citation.volume | 677 | - |
dc.citation.number | 1 | - |
dc.contributor.affiliatedAuthor | Hong, Jeongsoo | - |
dc.contributor.affiliatedAuthor | Kim, Ki Hyn | - |
dc.contributor.affiliatedAuthor | Kim, Kyung Hwan | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | Mo | - |
dc.subject.keywordAuthor | SiC | - |
dc.subject.keywordAuthor | Schottky contacts | - |
dc.subject.keywordAuthor | RTA | - |
dc.subject.keywordAuthor | FTS | - |
dc.subject.keywordPlus | DIODES | - |
dc.subject.keywordPlus | PARAMETERS | - |
dc.subject.keywordPlus | CONSTANT | - |
dc.subject.keywordPlus | PLOT | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Crystallography | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Crystallography | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
1342, Seongnam-daero, Sujeong-gu, Seongnam-si, Gyeonggi-do, Republic of Korea(13120)031-750-5114
COPYRIGHT 2020 Gachon University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.