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Properties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system

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dc.contributor.author최형욱-
dc.date.available2020-04-24T15:44:47Z-
dc.date.issued2009-07-24-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/33524-
dc.titleProperties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system-
dc.title.alternativeProperties of AIZTO(Al-In-Sn-ZnO) thin film prepared by facing target sputtering system-
dc.typeConference-
dc.citation.conferenceNameThe 13th Japan-Korea International Syposium on Advanced Display Materials and Devices-
dc.citation.conferencePlace일본-
dc.citation.conferencePlace히로시마, 일본-
dc.citation.endPage173-
dc.citation.startPage173-
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