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대향타켓식 스퍼터링 방법을 이용한 IZTO 박막의 제작
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최명규 | - |
| dc.date.available | 2020-04-24T19:40:35Z | - |
| dc.date.issued | 2008-02-15 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/35632 | - |
| dc.title | 대향타켓식 스퍼터링 방법을 이용한 IZTO 박막의 제작 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국진공학회 동계 정기학술대회 초록집 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.conferencePlace | 단국대학교 죽전 캠퍼스 | - |
| dc.citation.endPage | 1 | - |
| dc.citation.startPage | 1 | - |
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