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Mechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics

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dc.contributor.author이은철-
dc.date.available2020-04-24T20:38:53Z-
dc.date.issued2007-11-05-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/35838-
dc.titleMechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics-
dc.title.alternativeMechanism for nitrogen-enhanced negative bias temperature instability (NBTI) in state-of-the-art MOSFETs with ultrathin Si oxynitride gate dielectrics-
dc.typeConference-
dc.citation.conferenceName한국바이오칩학회 2007 추계학술대회-
dc.citation.conferencePlaceSouth Korea-
dc.citation.conferencePlace경원대학교-
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바이오나노대학 > 나노물리학과 > 2. Conference Papers

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