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Preparation of thin film electrode for display by using facing targets sputtering methodPreparation of thin film electrode for display by using facing targets sputtering method

Alternative Title
Preparation of thin film electrode for display by using facing targets sputtering method
Authors
박상준
Issue Date
30-Nov-2006
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36498
Place
일본
일본 나고야
metadata.conference.dc.citation.conferenceName
International Symposium on Dry Process 2006
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공과대학 > 화공생명공학과 > 2. Conference Papers

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Engineering (Department of Chemical and Biological Engineering)
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