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RF 스퍼터링 법에 의한 ZnO 박막의 결정성과 기판의 냉각속도
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이능헌 | - |
| dc.date.available | 2020-04-24T23:36:14Z | - |
| dc.date.issued | 2006-11-11 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36596 | - |
| dc.title | RF 스퍼터링 법에 의한 ZnO 박막의 결정성과 기판의 냉각속도 | - |
| dc.title.alternative | The crystalline characteristics of ZnO deposited on various cooling rates by RF sputter | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2006년도 한국전기전자재료학회 추계학술대회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.conferencePlace | 전북대학교 | - |
| dc.citation.endPage | 257 | - |
| dc.citation.startPage | 257 | - |
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