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RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이능헌 | - |
| dc.date.available | 2020-04-24T23:37:19Z | - |
| dc.date.issued | 2006-10-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36663 | - |
| dc.title | RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구 | - |
| dc.title.alternative | Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2006년도 대한전기학회 전기물성·응용부문회 추계학술대회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.conferencePlace | 강원도 강촌리조트 | - |
| dc.citation.endPage | 24 | - |
| dc.citation.startPage | 24 | - |
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