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ZnO를 이용한 air-gap 형태의 FBAR 소자 제작에 대한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이능헌 | - |
| dc.date.available | 2020-04-24T23:39:48Z | - |
| dc.date.issued | 2006-07-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36821 | - |
| dc.title | ZnO를 이용한 air-gap 형태의 FBAR 소자 제작에 대한 연구 | - |
| dc.title.alternative | A study of air-gap type FBAR device fabrication using ZnO | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2006년도 대한전기학회 하계학술대회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.conferencePlace | 용평리조트 | - |
| dc.citation.endPage | 1414 | - |
| dc.citation.startPage | 1414 | - |
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