RF 마그네트론 스퍼터링에 의해 증착된 SMR 구조 FBAR 소자의 Bragg 반사층의 미세구조 특성에 관한 연구
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 신영화 | - |
dc.date.available | 2020-04-25T01:36:44Z | - |
dc.date.issued | 2005-07-20 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37244 | - |
dc.title | RF 마그네트론 스퍼터링에 의해 증착된 SMR 구조 FBAR 소자의 Bragg 반사층의 미세구조 특성에 관한 연구 | - |
dc.title.alternative | Micro-structural characteristics of Bragg reflector of SMR type FBAR device deposited by RF magnetron sputtering | - |
dc.type | Conference | - |
dc.citation.conferenceName | 대한전기학회 제 36회 하계학술대회 | - |
dc.citation.conferencePlace | South Korea | - |
dc.citation.conferencePlace | 강원도 평창군 휘닉스파크 | - |
dc.citation.endPage | 1994 | - |
dc.citation.startPage | 1992 | - |
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