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FBAR소자의 Bragg 반사층의 SiO2 박막 특성에 관한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이능헌 | - |
| dc.date.available | 2020-04-25T01:36:52Z | - |
| dc.date.issued | 2005-07-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37252 | - |
| dc.title | FBAR소자의 Bragg 반사층의 SiO2 박막 특성에 관한 연구 | - |
| dc.title.alternative | Structure characteristics of SiO2 thin film of the FBAR Bragg reflector | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 2005년도 하계학술대회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.conferencePlace | 경주교육문화회관 | - |
| dc.citation.endPage | 378 | - |
| dc.citation.startPage | 377 | - |
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