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Two-Step 스퍼터링 법에 의한 Co77Cr20Ta3 박막의 결정학적 특성

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dc.contributor.author최형욱-
dc.date.available2020-04-25T02:39:40Z-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37731-
dc.titleTwo-Step 스퍼터링 법에 의한 Co77Cr20Ta3 박막의 결정학적 특성-
dc.typeConference-
dc.citation.conferenceName한국전기전자재료학회 2002년도 추계학술대회-
dc.citation.conferencePlace대한민국-
dc.citation.endPage103-
dc.citation.startPage103-
dc.citation.title한국전기전자재료학회-
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College of IT Convergence (Department of Electrical Engineering)
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