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Two-Step 스퍼터링 법에 의한 Co77Cr20Ta23 박막의 결정학 특성

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dc.contributor.author박용서-
dc.date.available2020-04-25T02:39:43Z-
dc.identifier.urihttps://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37734-
dc.titleTwo-Step 스퍼터링 법에 의한 Co77Cr20Ta23 박막의 결정학 특성-
dc.typeConference-
dc.citation.conferenceName한국전기전자 재료학회-
dc.citation.conferencePlaceSouth Korea-
dc.citation.endPage106-
dc.citation.startPage103-
dc.citation.title2002년도 추계학술대회 논문집-
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