Two-Step 스퍼터링 법에 의한 Co77Cr20Ta23 박막의 결정학 특성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박용서 | - |
dc.date.available | 2020-04-25T02:39:43Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37734 | - |
dc.title | Two-Step 스퍼터링 법에 의한 Co77Cr20Ta23 박막의 결정학 특성 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국전기전자 재료학회 | - |
dc.citation.conferencePlace | South Korea | - |
dc.citation.endPage | 106 | - |
dc.citation.startPage | 103 | - |
dc.citation.title | 2002년도 추계학술대회 논문집 | - |
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