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FBAR 소자용 Si Membrane 구조 제작 및 ZnO 압전박막 증착
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김종성 | - |
| dc.date.available | 2020-04-25T02:40:56Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37806 | - |
| dc.title | FBAR 소자용 Si Membrane 구조 제작 및 ZnO 압전박막 증착 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 화학공학회 | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.endPage | 2093 | - |
| dc.citation.startPage | 2093 | - |
| dc.citation.title | 화학공학의 이론과 응용 | - |
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Collections - 공과대학 > 화공생명공학과 > 2. Conference Papers
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Related Researcher
- Kim, Jong Sung
- Engineering (화공생명배터리공학부)