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Effect of Amorphous Si Underlayer to CoCrTa/Si Thin Film perpared by Facing Targets Sputtering System
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최동진 | - |
| dc.date.available | 2020-04-25T03:37:13Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37890 | - |
| dc.title | Effect of Amorphous Si Underlayer to CoCrTa/Si Thin Film perpared by Facing Targets Sputtering System | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ICEE2002 전기공학 국제학술대회(The International Conference on Electical Engineering) | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.endPage | 1225 | - |
| dc.citation.startPage | 1222 | - |
| dc.citation.title | International Conference on Electrical Engineering 2002 | - |
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