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Fabrication of FBAR based on ZnO thin fikms
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이능헌 | - |
| dc.date.available | 2020-04-25T03:37:18Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37896 | - |
| dc.title | Fabrication of FBAR based on ZnO thin fikms | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | APCPST, SPSM,KAPRA | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.title | Proceedings of Joint International Plasma Symposium | - |
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