대향타겟식 스퍼터법으로 제작된 AlN 박막의 결정학적 특성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최형욱 | - |
dc.date.available | 2020-04-25T05:40:01Z | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/38680 | - |
dc.title | 대향타겟식 스퍼터법으로 제작된 AlN 박막의 결정학적 특성 | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국전기전자재료학회 | - |
dc.citation.conferencePlace | South Korea | - |
dc.citation.endPage | 466 | - |
dc.citation.startPage | 464 | - |
dc.citation.title | 한국전기전자재료학회 2000년도 하계학술대회 논문집 | - |
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