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대향타겟식 스퍼터링법으로 제작된 ZnO박막의 C축 배향성
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 최동진 | - |
| dc.date.available | 2020-04-25T07:38:52Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39225 | - |
| dc.title | 대향타겟식 스퍼터링법으로 제작된 ZnO박막의 C축 배향성 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.endPage | 687 | - |
| dc.citation.startPage | 685 | - |
| dc.citation.title | 춘계 전기전자재료학술대회 논문집 | - |
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