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Atomic Hydrogen Reaction with Si(100) Surfaces: Etching, Amorphization, and Bulk Diffusion
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조삼근 | - |
| dc.date.available | 2020-04-25T08:40:17Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39619 | - |
| dc.title | Atomic Hydrogen Reaction with Si(100) Surfaces: Etching, Amorphization, and Bulk Diffusion | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 56차 대한화학회 물리화학분과 하계 심포지움 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.endPage | 1 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.title | 대한화학회 초록 | - |
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Related Researcher
- Jo, Sam Keun
- BioNano Technology (Department of Chemistry)