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Dry Etching of Si(100) by Hydrogen Atoms
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 조삼근 | - |
| dc.date.available | 2020-04-25T09:36:40Z | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/39711 | - |
| dc.title | Dry Etching of Si(100) by Hydrogen Atoms | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 81회 대한화학회 전국 학술대회 | - |
| dc.citation.conferencePlace | South Korea | - |
| dc.citation.endPage | 1 | - |
| dc.citation.startPage | 1 | - |
| dc.citation.title | 대한화학회 초록집 | - |
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Collections - 바이오나노대학 > 나노화학과 > 2. Conference Papers
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Related Researcher
- Jo, Sam Keun
- BioNano Technology (Department of Chemistry)