스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 홍정수 | - |
dc.contributor.author | Nobuhiro Matsushita | - |
dc.contributor.author | Ken-ichi Katsumata | - |
dc.contributor.author | 박용서 | - |
dc.contributor.author | 김경환 | - |
dc.date.available | 2020-02-27T14:40:57Z | - |
dc.date.created | 2020-02-12 | - |
dc.date.issued | 2018 | - |
dc.identifier.issn | 1738-2270 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/4742 | - |
dc.description.abstract | In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of 85oC. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to 3.9 x 10-2 Ω·cm, after UV irradiation. | - |
dc.language | 한국어 | - |
dc.language.iso | ko | - |
dc.publisher | 한국반도체디스플레이기술학회 | - |
dc.relation.isPartOf | 반도체디스플레이기술학회지 | - |
dc.title | 스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성 | - |
dc.title.alternative | Property of Spin-sprayed ZnO Film on PC Substrate | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 2 | - |
dc.identifier.bibliographicCitation | 반도체디스플레이기술학회지, v.17, no.3, pp.27 - 30 | - |
dc.identifier.kciid | ART002393742 | - |
dc.citation.endPage | 30 | - |
dc.citation.startPage | 27 | - |
dc.citation.title | 반도체디스플레이기술학회지 | - |
dc.citation.volume | 17 | - |
dc.citation.number | 3 | - |
dc.contributor.affiliatedAuthor | 홍정수 | - |
dc.contributor.affiliatedAuthor | 박용서 | - |
dc.contributor.affiliatedAuthor | 김경환 | - |
dc.subject.keywordAuthor | Spin-spray | - |
dc.subject.keywordAuthor | ZnO | - |
dc.subject.keywordAuthor | Transparent electrode | - |
dc.subject.keywordAuthor | UV | - |
dc.subject.keywordAuthor | Conductivity | - |
dc.description.journalRegisteredClass | kci | - |
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