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Results 1-2 of 2 (Search time: 0.023 seconds).
Effect of electrode heating on the distribution of the ion production rate in a capacitively coupled plasma deposition reactor in consideration of thermal decomposition
Kim, Ho Jun
Article
Issue Date
2021
Citation
VACUUM, v.189
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Analysis of thermal diffusion effects observed in a capacitively coupled plasma deposition reactor with non-isothermal walls
Kim, Ho Jun
Article
Issue Date
2021
Citation
Vacuum, v.187
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
1
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Author
Kim, Ho-Jun
2
Subject
Capacitively coupled plasmas
2
Fluid simulation
2
Hydrogenated amorphous silicon
2
Non-isothermal wall condition
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Plasma enhanced chemical vapor de...
2
Amorphous silicon
1
Capacitively coupled plasma
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Carrier concentration
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Chemical vapour deposition
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Deposition rates
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Date Issued
2021
2
Type
Article
2
Language
English
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