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Results 1-1 of 1 (Search time: 0.002 seconds).
Helium Metastable Distributions and Their Effect on the Uniformity of Hydrogenated Amorphous Silicon Depositions in He/SiH4 Capacitively Coupled Plasmas
open access
Jo, Sanghyun; Kang, Suik;
Lee, Kyungjun
; Kim, Ho Jun
Article
Issue Date
2022
Citation
COATINGS, v.12, no.9
Publisher
MDPI
1
Discover
Author
Jo, Sanghyun
1
Kang, Suik
1
Subject
capacitively coupled plasmas
1
DENSITY
1
hydrogenated amorphous silicon
1
plasma-enhanced chemical vapor de...
1
process uniformity
1
SIMULATION
1
Date Issued
2022
1
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Article
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English
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Coatings
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