NOX 가스 검출 특성을 이용한 MWCNT/ZnO 복합체 필름 가스 센서의 메커니즘 분석

Abstract

In this study, we fabricated an NOX gas sensor using a composite film of multi-walled carbon nanotubes(MWCNT)/zinc oxide (ZnO). Carbon nanotubes (CNTs) show good electronic conductivity and chemical-stability, and zincoxide (ZnO) is a wide band gap semiconductor with a large exciton binding energy. Gas sensors require characteristicssuch as high speed, sensitivity, and selectivity. The fabricated gas sensor was used to detect NOX gas at different NOXconcentrations. The sensitivity of the gas sensor increased with increasing gas concentrations. Additionally, while changingthe temperature inside the chamber containing the MWCNT/ZnO gas sensor, we obtained the sensitivity and normalizedresponses for detecting NOX gas in comparison to ZnO and MWCNT film gas sensors. From the experimental results, weconfirmed that the gas sensor sensing mechanism was enhanced in the composite-film gas-sensor and that the electronicinteraction between MWCNT and ZnO contributed to the improved sensor performance.