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The study of correlation between electrical conductivity of solution-processed ZnO film and UV irradiation

Authors
Hong, J.Lin, H.-E.Katsumata, K.-I.Matsushita, N.
Issue Date
Dec-2020
Publisher
Elsevier Ltd
Keywords
Conductivity; Spin-spray; UV; UV patterning; ZnO
Citation
Materials Science in Semiconductor Processing, v.120
Journal Title
Materials Science in Semiconductor Processing
Volume
120
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/78294
DOI
10.1016/j.mssp.2020.105266
ISSN
1369-8001
Abstract
This study investigated the correlation between the electrical conductivity of solution-processed ZnO film and UV irradiation. As-deposited ZnO film without UV irradiation was found to have a high resistivity, while the resistivity of UV irradiated ZnO film drastically decreased, owing to photo-induced doping under UV irradiation. The effect of UV intensity on the decomposition rate of organic substance indicated proportional relation. In addition, a transparent electric circuit was fabricated by UV patterning. © 2020 Elsevier Ltd
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College of IT Convergence (Department of Electrical Engineering)
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