Structural properties of LaAlO3/SrTiO3 interfaces deposited by using off-axis RF sputtering
DC Field | Value | Language |
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dc.contributor.author | Kim, Do Hyun | - |
dc.contributor.author | Bark, Chung Wung | - |
dc.date.available | 2020-02-28T01:45:10Z | - |
dc.date.created | 2020-02-06 | - |
dc.date.issued | 2016-06 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/8257 | - |
dc.description.abstract | To demonstrate the capability of growing conductive interfaces through large-scale deposition, we deposited amorphous LaAlO3(LAO)/SrTiO3(STO) by using off-axis RF-sputtering. The LAO/STO thin film deposited within the 2.0-inch range exhibited conducting properties. To confirm the structural properties and ensure accurate characterization of the LAO/STO films prepared by using off-axis sputtering, we performed X-ray reflectivity (XRR) and scanning electron microscopy (SEM) measurements. This paper reports on the structural properties of LAO/STO interfaces and discusses the interfacial quality and layer-to-layer uniformity based on a fitting of the XRR data. In terms of structural properties, the LAO/STO film deposited within the 1.35-inch range had the best surface among all investigated samples. | - |
dc.language | 영어 | - |
dc.language.iso | en | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.subject | 2-DIMENSIONAL ELECTRON-GAS | - |
dc.subject | HETEROSTRUCTURES | - |
dc.subject | STOICHIOMETRY | - |
dc.subject | FILMS | - |
dc.title | Structural properties of LaAlO3/SrTiO3 interfaces deposited by using off-axis RF sputtering | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.description.journalClass | 1 | - |
dc.identifier.wosid | 000378943400004 | - |
dc.identifier.doi | 10.3938/jkps.68.1395 | - |
dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.68, no.12, pp.1395 - 1398 | - |
dc.identifier.kciid | ART002120901 | - |
dc.identifier.scopusid | 2-s2.0-84976633077 | - |
dc.citation.endPage | 1398 | - |
dc.citation.startPage | 1395 | - |
dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.citation.volume | 68 | - |
dc.citation.number | 12 | - |
dc.contributor.affiliatedAuthor | Kim, Do Hyun | - |
dc.contributor.affiliatedAuthor | Bark, Chung Wung | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | 2D electron gas | - |
dc.subject.keywordAuthor | Off-axis sputtering | - |
dc.subject.keywordAuthor | X-ray reflectivity | - |
dc.subject.keywordAuthor | Scanning electron microscopy | - |
dc.subject.keywordPlus | 2-DIMENSIONAL ELECTRON-GAS | - |
dc.subject.keywordPlus | HETEROSTRUCTURES | - |
dc.subject.keywordPlus | STOICHIOMETRY | - |
dc.subject.keywordPlus | FILMS | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
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