A PDMS membrane microvalve with one-dimensional line valve seat for robust microfluidics

Abstract

We have developed a monolithic polydimethylsiloxane (PDMS) membrane microvalve with an isotropically etched valve seat for robust microfluidics. In order to avoid bonding or sticking of the PDMS membrane to the valve seat during the bonding process, the valve seat was wet-etched to be a one-dimensional line instead of a plane. The simple wet-etching technique allowed for the fabrication of an anti-bonding architecture in a scalable manner, and it intrinsically prevented contact between the PDMS membrane and valve seat when no external force was applied (i.e., normally open). This approach enables the permanent device assembly so that the microfluidic chip can be operable in a wide range of fluid pressures (e. g., over 200 kPa) without any leakage and sticking problems.