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Effect of Hydrogen Plasma Treatment on Atomic Layer Deposited Silicon Nitride FilmGo to Link

정찬원; Song, Seokhwi; 김지수; Park, Suhyeon; Kim, Byunguk; 김경후; Jeon, Hyeongtag

ArticleIssue Date2022CitationECS Journal of Solid State Science and Technology, v.11, no.6, pp 1 - 8PublisherElectrochemical Society, Inc.
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