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Analysis of Electron Temperature in DC Ar/SF6 Plasma Using Cylindrical and Planar ProbesGo to Link

Kim, Jin-Woo; Cho, Soon-Gook; Bae, Min-Keun; Kim, Hyung-Jin; Chung, Tae Hun; Chung, Kyu-Sun

ArticleIssue Date2013CitationJapanese Journal of Applied Physics, v.52, no.11, pp 1 - 4PublisherIOP Publishing Ltd
SCIESCOPUS
Three point method to characterize low-pressure electronegative discharges using electrostatic probeGo to Link

Kang, Sung Young; Chung, Tae Hun; Chung, Kyu Sun

ArticleIssue Date2009CitationReview of Scientific Instruments, v.80, no.1, pp 1 - 5PublisherAmerican Institute of Physics
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