Cho, Gu Young; Noh, Seungtak; Lee, Yoon Ho; Ji, Sanghoon; Hong, Soon Wook; Koo, Bongjun; An, Jihwan; Kim, Young-Beom; Cha, Suk Won
ArticleIssue Date2016CitationJournal of Vacuum Science and Technology A, v.34, no.1PublisherAmerican Institute of Physics