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Stochastic Kriging-assisted Controlled Random Search for Simulation Optimization and Its Application to Critical Dimension MeasurementGo to Link

Kim, Hyungjin; Hwang, Aerim; Tsai, Shingchih; Park, Chuljin

ArticleIssue Date2026CitationIEEE Transactions on Automation Science and Engineering, v.23, pp 2774 - 2787PublisherInstitute of Electrical and Electronics Engineers Inc.
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