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A comparative study of principal component analysis and machine learning for semiconductor micro-defect detection using scanning acoustic microscopyGo to Link

Jo, Hyeonggeun; Kim, Hyun-su; Ghang, Sejong; Kim, Minseok; Kim, Minho; Jeong, Giho; Lee, Seokkyu; Park, Kwan Kyu

ArticleIssue Date2026CitationNDT and E International, v.157, pp 1 - 18PublisherElsevier BV
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