Baek, Dong-Hyun; Han, Chang-Hee; Jung, Ha-Chul; Kim, Seon Min; Im, Chang-Hwan; Oh, Hyun-Jik; Pak, James Jungho; Lee, Sang-Hoon
ArticleIssue Date2012CitationJournal of Micromechanics and Microengineering, v.22, no.11, pp.1 - 8PublisherIOP PUBLISHING LTD