ScholarWorks@Hanyang University

Browsing by Katoh, TakeoAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 2 of 2

SCIESCOPUS
Dependence of non-Prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishingGo to Link

Kang, Hyun-Goo; Kim, Dae-Hyeong; Katoh, Takeo; Kim, Sung-Jun; Paik, Ungyu; Park, Jea-Gun

ArticleIssue Date2006CitationJapanese Journal of Applied Physics, v.45, no.5A, pp 3896 - 3904PublisherIOP Publishing Ltd
SCIESCOPUS
The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing processGo to Link

Kim, Sang-Kyun; Kim, Ye-Hwan; Paik, Ungyu; Katoh, Takeo; Park, Jea-Gun

ArticleIssue Date2006CitationJournal of Electroceramics, v.17, no.2-4, pp 835 - 839PublisherKluwer Academic Publishers
1
CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1366

COPYRIGHT © 2024 HANYANG UNIVERSITY.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어