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Effects of calcination and milling process conditions for ceria slurry on shallow-trench-isolation chemical-mechanical polishing performanceGo to Link

Kim, Jun-Seok; Kang, Hyun-Goo; Kanemoto, Manabu; Paik, Ungyu; Park, Jea-Gun

ArticleIssue Date2007CitationJapanese Journal of Applied Physics, v.46, no.12, pp 7671 - 7677PublisherIOP Publishing Ltd
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