ScholarWorks@Hanyang University: Browsing ScholarWorks

Browsing by Kim, KeunjunAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Sort by: In order: Results/Page Authors/Record:

Showing results 1 to 5 of 5

SCIESCOPUSKCI

Characteristics of cobalt films deposited by using a remote plasma ALD method with a CpCo(CO)(2) precursor Go to Link

Lee, Keunwoo; Kim, Keunjun; Jeon, Hyeongtag; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin

ArticleIssue Date2007CitationJournal of the Korean Physical Society, v.50, no.4, pp 1141 - 1146Publisher한국물리학회

SCIESCOPUS

Characteristics of cobalt thin films deposited by remote plasma ALD method with dicobalt octacarbonyl Go to Link

Kim, Keunjun; Lee, Keunwoo; Han, Sejin; Jeong, Wooho; Jeon, Hyeongtag

ArticleIssue Date2007CitationJournal of the Electrochemical Society, v.154, no.3, pp H177 - H181PublisherElectrochemical Society, Inc.

SCIESCOPUS

Characteristics of Ti-capped Co films deposited by a remote plasma ALD method using cyclopentadienylcobalt dicarbonyl Go to Link

Lee, Keunwoo; Kim, Keunjun; Park, Taeyong; Jeon, Hyeongtag; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin

ArticleIssue Date2007CitationJournal of the Electrochemical Society, v.154, no.10, pp H899 - H903PublisherElectrochemical Society, Inc.

SCOPUS

Cobalt thin film deposited by remote plasma atomic layer deposition method using Cl2H10O6(CO)2 and CpCo(CO)2 Go to Link

Lee, Keunwoo; Kim, Keunjun; Jeong, Wooho; Park, Taeyong; Jeon, Hyeongtag

ArticleIssue Date2007CitationSolid State Phenomena, v.124-126, no.PART 1, pp 359 - 362PublisherScitec Publications Ltd.

SCIESCOPUS

Comparison of co films deposited by remote plasma atomic layer deposition method with cyclopentadienylcobalt dicarbonyl [CpCo(CO)(2)] and dicobalt octacarbonyl [Co-2(CO)(8)]Go to Link

Kim, Keunjun; Lee, Keunwoo; Han, Sejin; Park, Taeyong; Lee, Youngjin; Kim, Jeongtae; Yeom, Seungjin; Jeon, Hyeongtag

ArticleIssue Date2007CitationJapanese Journal of Applied Physics, v.46, no.8-11, pp L173 - L176PublisherIOP Publishing Ltd

RSS_1.0 RSS_2.0 ATOM_1.0

222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1366

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Kim, KeunjunAuthor

BROWSE