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Influence of crystalline structure of ceria on the remaining particles in the STI CMPGo to Link

Kim, Sang Kyun; Kim, Ye Hwan; Paik, Ungyu; Park, Jea Gun

ArticleIssue Date2007CitationJournal of the Electrochemical Society, v.154, no.7, pp H642 - H646PublisherElectrochemical Society, Inc.
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