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Crater-free through-silicon vias formation by hybrid multi-step femtosecond laser drilling: Surface morphology control and residual stress reductionGo to Link

Kim, Taesik; Lee, Jaebeom; Choi, Seon-Jin; Park, Jiyong

ArticleIssue Date2026CitationJournal of Materials Processing Technology, v.347, pp 1 - 19PublisherElsevier BV
SCIESCOPUS
Realization of Spatially Addressable Library by a Novel Combinatorial Approach on Atomic Layer Deposition: A Case Study of Zinc OxideGo to Link

Kim, Harrison Sejoon; Lee, Joy S.; Kim, Si Joon; Lee, Jaebeom; Lucero, Antonio T.; Sung, Myung Mo; Kim, Jiyoung

ArticleIssue Date2019CitationACS COMBINATORIAL SCIENCE, v.21, no.6, pp.445 - 455PublisherAMER CHEMICAL SOC
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