Park, Taeyong; Lee, Jaesang; Park, Jingyu; Jeon, Heeyoung; Jeon, Hyeongtag; Lee, Ki-Hoon; Cho, Byung-Chul; Kim, Moo-Sung; Ahn, Heui-Bok
ArticleIssue Date2012CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.30, no.1, pp.1 - 6PublisherA V S AMER INST PHYSICS