Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.; Haukka, Suvi; Jeon, Hyeongtag; Kessels, W. M. M. (Erwin); Leskela, Markku; Poodt, Paul; Ritala, Mikko; Rossnagel, Steven M.
ArticleIssue Date2013CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, v.31, no.5, pp.1 - 12PublisherA V S AMER INST PHYSICS