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Effect of Hydrogen Profile in Flash Memory SiNx Charge Trap Layer with Different Silicon to Nitrogen RatiosGo to Linkopen access

Choi, Sehyeon; Lim, Yunseo; Kim, Sejin; Park, San; Ku, Boncheol; Kim, Hyungjun; Yang, Jaehyun; Kim, Bio; Son, Youngseon; Choi, Hanmei, et al.

ArticleIssue Date2025CitationAdvanced Electronic Materials, v.11, no.15, pp 1 - 9PublisherWiley-VCH Verlag
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