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Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithographyGo to Linkopen access

Chu, Thi Thu Huong; Le, Dan N.; Lee, Minjong; Narayan, Dushyant M.; Kim, Doo San; Shirodkar, Soham; Choe, Minki; Yoo, Suyoung; Tiwale, Nikhil; Choi, Rino, et al.

ArticleIssue Date2026CitationCHEMICAL SCIENCE, v.17, no.24, pp 11754 - 11773PublisherROYAL SOC CHEMISTRY
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