Jeong, Kyunghoon; Lee, Jiwon; Byun, Injae; Seong, Myung-jun; Park, Jongsoo; Kim, Hyoun Woo; Kim, Moon J.; Kim, Jae-Hun; Lee, Jaegab
ArticleIssue Date2017CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.68, pp.245 - 251PublisherELSEVIER SCI LTD