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Long-tailed detection and classification of wafer defects from scanning electron microscope images robust to diverse image backgrounds and defect scalesGo to Link

Park, Taekyeong; Son, Yongho; Moon, Sanghyuk; Han, Seungju; Hong, Je Hyeong

ArticleIssue Date2025CitationEngineering Applications of Artificial Intelligence, v.162, pp 1 - 17PublisherPergamon Press Ltd.
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