Parsons, Gregory N.; Elam, Jeffrey W.; George, Steven M.; Haukka, Suvi; Jeon, Hyeongtag; Kessels, W. M. M. (Erwin); Leskela, Markku; Poodt, Paul; Ritala, Mikko; Rossnagel, Steven M.
ArticleIssue Date2013CitationJournal of Vacuum Science and Technology A, v.31, no.5, pp 1 - 12PublisherAmerican Institute of Physics
